Flow Controllers


As the industry leading supplier, Parker offers liquid and gas, electronic, manual and thermal mass flow controllers (MFCs) for flow rate applications. Parker’s line of MFCs includes models for vapor delivery systems, liquid MFC, gas MFCs and variable constant differential flow controllers.





Air Flow Controllers

Quick response times and efficient operation are guaranteed with Parker airflow controllers. Our airflow controllers are ideal for semiconductor, biotechnology, pharmaceutical, chemical, petrochemical and surface treatment applications.

3200 SERIES MFM AND MFC

Speed Controller Port Size:Rc1/4・Rc3/8・Rc1/2・Rc3/4・Rc1 Model:SC

Suitable for actuator speed control.

Speed Controller Port Size:Rc1/8・Rc1/4・Rc3/8・Rc1/2 Model:SC5

Suitable for actuator speed control.

Speed Controller Port Size:M5×0.8・R1/8・R1/4・R3/8 Model:SC8

Compact type controllers which can be installed directly on cylinders.

Elbow Type Speed Controllers (with quick joint) Port Size:M5×0.8・R1/8・R1/4・R3/8・R1/2 Model:SC75

Speed controllers ensuring tubing direction in 360° and having joint for quick tube connection.

Biaxial Rotation Type Speed Controllers (with quick joint) Port Size:M5×0.8・R1/8・R1/4・R3/8 Model:SC76

Speed controllers ensuring threedimensional piping and having joint for quick tube connection.

Speed Controller Muffler Port Size:M5×0.8・R1/8・R1/4・R3/8・R1/2・R3/4・R1 Model:SM1

Silencer and throttle valve are integrated.



Gas Flow Controllers

Quick response times and efficient operation are guaranteed with Parker airflow controllers. Our airflow controllers are ideal for semiconductor, biotechnology, pharmaceutical, chemical, petrochemical and surface treatment applications.

MODEL 201 MASS FLOW CONTROLLER

MODEL 202A MASS FLOW CONTROLLER

MODEL 3201 MASS FLOW CONTROLLER

MODEL VCD 1000 VARIABLE CONSTANT DIFFERENTIAL FLOW CONTROLLER

MFC MODELS 201-251

Sample Conditioning System

Process Analyzer Vent-Header Pressure Control System

The Parker VentMaster system is comprised of regulators, gauges, a rotameter, a controller and an eductor mounted in a small enclosure for ease of operation and installation.

Sample Conditioning Communications Interface - Pilot Pro Series

The Pilot Pro™ product has been designed with a high level of flexibility to accommodate multiple configurations of local area communications networks.



Liquid Flow Controllers

Parker liquid flow controllers are designed to address the need for fast, precise control of liquid precursors in semiconductor manufacturing processes, as well as various applications in the biotechnology, pharmaceutical, chemical, petrochemical and surface treatment industries. Clean room assembly and all metal seal construction ensure high purity and leak integrity.

D SERIES MASTER CONTROL

DL SERIES MASTER CONTROL

MODEL D2000I SERIES LIQUID MASS FLOW CONTROLLERS AND MASS FLOWMETERS

LIQUID MFC D2000I SERIES